Ion Implantation with Scanning Probe Alignment
نویسندگان
چکیده
We describe a scanning probe instrument which integrates ion beams with the imaging and alignment function of a piezo-resistive scanning probe in high vacuum. The beam passes through several apertures and is finally collimated by a hole in the cantilever of the scanning probe. The ion beam spot size is limited by the size of the last aperture. Highly charged ions are used to show hits of single ions in resist, and we discuss the issues for implantation of single ions.
منابع مشابه
Integration of scanning probes and ion beams.
We report the integration of a scanning force microscope with ion beams. The scanning probe images surface structures non-invasively and aligns the ion beam to regions of interest. The ion beam is transported through a hole in the scanning probe tip. Piezoresistive force sensors allow placement of micromachined cantilevers close to the ion beam lens. Scanning probe imaging and alignment is demo...
متن کاملCharacterization of Duplex Hard Coatings with Additional Ion Implantation
In this paper, we present the results of a study of TiN thin fi lms which are deposited by a Physical Vapour Deposition (PVD) and Ion Beam Assisted Deposition (IBAD). In the present investigation the subsequent ion implantation was provided with N2+ ions. The ion implantation was applied to enhance the mechanical properties of surface. The thin fi lm deposition process exerts a number of eff ec...
متن کاملRoom-temperature growth of ion-induced carbon nanofibers: Effects of ion species
Graphite surfaces were bombarded with Ne, Ar and Xe ions at 450 eV–1 keV to induce the carbon nanofiber (CNF) growth at room temperature, and the dependence of size and numerical density of ion-induced CNFs on the ion species and ion energy was investigated in detail. The ion-sputtered surfaces were covered with densely distributed conical protrusions and aligned CNFs grew on the tips, except f...
متن کاملInfluence of nitrogen ion implantation on the nanostructure and corrosivity of Ni/stainless steel substrates
Ion implantation is a surface modification technology to produce new material on the surface by impingement of high energy ions from the ion accelerator. In this work, AISI 304 stainless steels were coated with 90 nm Ni film by electron beam deposition and implanted by a flow of 5×1017 N cm−2 at 400 K temperature with different implantation energies of 10, 20, 30 and 40 keV. The prepared sample...
متن کاملInfluence of Ni Deposition and Subsequent N+ Ion Implantation at Different Implantation Energies on Nano-Structure and Corrosion Behavior of 316 Stainless Steels
Nickel films of 300 nm thickness were deposited by electron beam evaporation at room temperature on 316 stainless steels. Corrosion studies of Ni coated 316 SS have been performed after N+ ion implantation at different energies of 20, 40, 60 and 80 keV. The structure and surface morphology of the films were evaluated using X-ray diffraction (XRD), atomic force microscope (AFM) an...
متن کامل